Local Heating of Pyrolyzed Polymer Heaters for Further Carbonization at Higher Temperature

This paper proposes a breakthrough in application of pyrolyzed polymer in MEMS field. It is one of drawbacks of pyrolyzed polymer that high temperature pyrolysis promoting further carbonization is difficult to be combined with MEMS process. Available temperature used to be restricted below 1000 ° C. Our key strategy is to use a conductive pyrolyzed polymer structure prepared at low temperature as a heater for finishing pyrolysis at high temperature. The local heating of pyrolyzed polymer heaters allows further carbonization at higher temperature. The obtained material by our strategy shows similar feature to commercialized glassy carbon prepared beyond above restriction.