Principle, Design and Future of Inchworm Type Piezoelectric Actuators

The inchworm type piezoelectric actuator is one novel actuator to ensure a large working stroke with high resolution which has attracted the continuous attentions from researchers all over the world. In this study, the motion principle of the inchworm type piezoelectric is discussed: the “walker” pattern, the “pusher” pattern and hybrid “walker-pusher” pattern. The classification (linear, rotary and multi-DOF) and development are introduced in details, some significant researches are illustrated. Finally, the future direction of inchworm type piezoelectric actuators is pointed out according the development of inchworm type piezoelectric actuators. This study shows the clear principle, design and future of inchworm type piezoelectric actuators which is meaningful for the development of piezoelectric actuators.