Inductance-controlled electroabsorption Modulator modules using the flip-chip bonding technique

The wire-bonding technique is widely used for the connections between the electroabsorption (EA) modulator chips and the electrical signal transmission lines. However, the parasitic inductance of the bonding wire degrades the electrical characteristics of the EA modulator modules in a high-frequency region. In this paper, we theoretically analyze the influence of parasitic inductance on the base-band digital transmission and obtain the relationship between the EA modulator capacitance and the optimum lead inductance. For precise inductance control, we introduced the flip-chip bonding (FCB) technique and fabricated 40-Gb/s EA modulator modules.