Microspherical surfaces with predefined focal lengths fabricated using microfluidic capillaries
作者
Victor Lien,Yevgeny Berdichevsky,Yu‐Hwa Lo
出处
期刊:Applied Physics Letters [American Institute of Physics] 日期:2003-12-19卷期号:83 (26): 5563-5565被引量:12
标识
DOI:10.1063/1.1637455
摘要
We demonstrate a technique to fabricate spherical micromirrors with a programmable focal length by microfluidic capillary. Micromirrors with focal lengths of 13 μm, 19 μm, 28 μm, 50 μm, and a flat mirror were fabricated and characterized. These micromirrors show a great ability to converge light into a focal point. This technique also introduces the concept of fabricating and integrating optical components with microfluidic channels.