钝化
共发射极
材料科学
光电子学
蚀刻(微加工)
薄脆饼
堆栈(抽象数据类型)
光刻
异质结
激光器
图层(电子)
干法蚀刻
平版印刷术
纳米技术
光学
计算机科学
物理
程序设计语言
作者
Sven Ring,Simon Kirner,Christof Schultz,Paul Sonntag,Bernd Stannowski,Lars Korte,Rutger Schlatmann
出处
期刊:IEEE Journal of Photovoltaics
日期:2016-07-01
卷期号:6 (4): 894-899
被引量:13
标识
DOI:10.1109/jphotov.2016.2566882
摘要
A novel emitter patterning method for back-contacted Si heterojunction solar cells is presented, which combines laser processing and wet etching of a mask layer stack with self-aligned repassivation, thus reducing the process complexity, as compared with the commonly used emitter patterning methods. Lifetime samples demonstrate that with a suitable mask stack, laser scribing can be performed without inducing laser damage to the passivation. Despite nonoptimal wet etch and repassivation processes which currently limit the obtained lifetime, proof-of-concept cells on p-type wafers fabricated using this novel emitter patterning process and lithographically patterned metallization exhibit an open-circuit voltage of 694 mV and pseudo-fill-factors of 83%. With the laser written mask layers for etching and self-aligned passivation process, we have thus developed the proof-of-concept for a simple, lithography free, and contactless emitter patterning method for industrial applications.
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