扫描电子显微镜
阴极射线
梁(结构)
缩放比例
光学
建筑
电子
比例(比率)
计算机科学
材料科学
物理
数学
几何学
核物理学
艺术
量子力学
视觉艺术
作者
C Riedesel,Ingo Müller,N Kaufmann,Andreas Adolf,Nico Kaemmer,H.‐G. Fritz,Anna Lena Eberle,D. Zeidler
摘要
We have demonstrated the successful operation of a multi-beam scanning electron microscope with 331 electron beams for the first time. This makes it the world's fastest SEM. The underlying architecture of the existing multi-beam mSEM technology fully supports the scale-up of the number of electron beams to 331. Scaling beyond this number is feasible.
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