材料科学
纳米光子学
激光器
纳米光刻
光学
光子晶体
飞秒
光电子学
蚀刻(微加工)
衍射
各向同性腐蚀
波长
纳米技术
制作
病理
替代医学
物理
医学
图层(电子)
作者
Airán Ródenas,Miṅ Gu,Giacomo Corrielli,Petra Paiè,Sajeev John,Ajoy K. Kar,Roberto Osellame
出处
期刊:Nature Photonics
[Springer Nature]
日期:2018-12-31
卷期号:13 (2): 105-109
被引量:161
标识
DOI:10.1038/s41566-018-0327-9
摘要
Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching reactivity of a crystal can be enhanced at the nanoscale by more than five orders of magnitude by means of direct laser writing. The process allows to produce cm-scale arbitrary three-dimensional nanostructures with 100 nm feature sizes inside large crystals in absence of brittle fracture. To showcase the unique potential of the technique, we fabricate photonic structures such as sub-wavelength diffraction gratings and nanostructured optical waveguides capable of sustaining sub-wavelength propagating modes inside yttrium aluminum garnet crystals. This technique could enable the transfer of concepts from nanophotonics to the fields of solid state lasers and crystal optics.
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