Photolytic CVD for one-step photomask repair

A laser based photolytic CVD Mask Repair System YL454A, capable of quickly and reliably repairing both clear and opaque defects, has been developed. For clear defect repairing, adhesive micrometer size chromium film of sharp-edged arbitrarily-sized rectangles, can be deposited in the opposite manner of conventional laser zapping process.