发射强度
强度(物理)
等离子体
化学
分析化学(期刊)
发射光谱
钻石
吸收(声学)
光谱学
原子物理学
材料科学
光学
谱线
离子
物理
有机化学
色谱法
量子力学
天文
复合材料
作者
A. N. Goyette,J. E. Lawler,L. W. Anderson,D. M. Gruen,Thomas McCauley,Daniel K. Zhou,A.R. Krauss
标识
DOI:10.1088/0963-0252/7/2/009
摘要
We report the systematic comparison of the optical emission intensity of the vibrational band of the Swan system with the absolute concentration in and microwave plasmas used in the deposition of nanocrystalline diamond. The absolute concentration is obtained using white-light absorption spectroscopy. Emission intensity correlates linearly with density for variations of several plasma parameters and across two decades of species concentration. Although optical emission intensity generally is not an accurate quantitative diagnostic for gas phase species concentrations, these results confirm the reliability of the (0,0) Swan band for relative determination of density with high sensitivity under conditions used for hydrogen-deficient plasma-enhanced chemical vapour deposition of diamond.
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