Reliability Study of the Band Gap of Rare Earth Oxides Measured by XPS Spectra

Subscript text Subscript text Er 2 O 3 、Tm 2 O 3 and Yb 2 O 3 films were deposited on Si (100) and quartz substrates by radio frequency magnetron technique. The energy gaps of the films were measured by X-ray photoelectron spectroscopy (XPS) and optical methods. The energy gaps of Er 2 O 3 、Tm 2 O 3 and Yb 2 O 3 are found to be 6.3±0.1、5.8±0.1 and 7.1±0.1 eV by optical measurements. For XPS measurements, the energy gaps of the films are 6.2±0.2、6.0±0.2 and 6.9±0.2 eV, respectively. The results show that using XPS to measure the energy gap of rare earth metal oxide film is feasible in an allowable deviation.