(Invited) Novel Integration Process for IGZO MO-TFT Fabrication on Gen 8.5 PECVD and PVD Systems - A Quest to Improve TFT Stability and Mobility

IGZO is one of the promising materials being used to make high-mobility TFTs for high-quality displays. However, a-IGZO TFTs have stability issues in addition to limited mobility (<10 cm 2 /V·s). AKT has made a stable a-IGZO TFT through ESL optimization and plasma treatment of the IGZO interface. AKT a-IGZO ES-TFT shows SS 0.4 ±0.1 V/dec, mobility 10 ±1.0 cm 2 /V·s, Von 0.25 ± 1.5V over 2200 x 2500 mm 2 substrate. BTS stability range under 80 o C, ±50V conditions is ~1.5V. Furthermore, another AKT MO ES-TFT shows >30 cm 2 /V·s mobility using multi-layer structure.