Deposition of hexamethyldisiloxane film by RF plasma polymerization

The ultra-thin hexamethyldisiloxane(HMDSO) film was deposited by RF plasma polymerization in this study.Optic emission spectrum(OES) was used to distinguish the active species in HMDSO plasma.The chemical structure and physical morphology of the film were investigated by Fourier transform infrared(FTIR),scanning electron microscope(SEM) and atomic force microscope(AFM).The OES results showed that the active species in plasma directly determined the molecular components of polymerized film.As shown in FTIR,the HMDSO plasma polymer contained Si—O,—CH3,—OH,CO,C—O and other functional groups.SEM and AFM indicated that pulsed plasma polymer was composed of submicron particles,which is a new form of polymerization film.