Variability Assessment of the Performance of MoS2-Based BioFETs

Two-dimensional material (2DM)-based Field-Effect Transistors (FETs) have been postulated as a solid alternative for biosensing applications thanks to: (i) the possibility to enable chemical sensitivity by functionalization, (ii) an atomically thin active area which guarantees optimal electrostatic coupling between the sensing layer and the electronic active region, and (iii) their compatibility with large scale fabrication techniques. Although 2DM-based BioFETs have demonstrated notable sensing capabilities, other relevant aspects, such as the yield or device-to-device variability, will demand further evaluation in order to move them from lab-to-fab applications. Here, we focus on the latter aspect by analyzing the performance of MoS2-based BioFETs for the detection of DNA molecules. In particular, we explore the impact of the randomized location and activation of the receptor molecules at the sensing interface on the device response. Several sensing interface configurations are implemented, so as to evaluate the sensitivity dependence on device-to-device variability.