Effect of Various Precursors on ZnO Thin Films by USP Technique

ZnO is one of the main materials used in thin film coating due to its low cost and advantageous properties. The aim of this study is to examine the optical, morphological and structural properties of zinc oxide thin films coated with ultrasonic spray pyrolysis(USP) technique. ZnO thin films were grown at 450°C using different precursor solutions such as zinc acetate and zinc nitrate. Glass substrate was used in these processes. 0.1M and 100 ml solutions were prepared. Growth orientations according to XRD patterns are (002). Bandgap values for zinc acetate and zinc nitrate were measured as 3.25 eV and 3.13 eV, respectively. In addition, as can be seen from the SEM images, the ZnO grain size of the films obtained with the zinc acetate salt is smaller than that of the zinc nitrate. Finally, the amount of oxygen in ZnO films varies depending on different solutions and zinc salts.