Position and density control of nitrogen-vacancy centers in diamond using micropatterned substrate for chemical vapor deposition

We demonstrate a promising technique to control the position and density of nitrogen-vacancy (NV) centers in diamond thin film grown on a diamond substrate using nitrogen-doped isotopically-purified chemical vapor deposition (CVD). We succeed in control of the lateral position and density of NV centers doped in diamond thin film utilizing a micropatterned diamond substrate for nitrogen-doped isotopically-purified CVD diamond growth.