数码产品
减色
吞吐量
计算机科学
纳米技术
柔性电子器件
限制
材料科学
工程类
机械工程
电气工程
无线
电信
艺术
视觉艺术
出处
期刊:Proceedings of the IEEE
[Institute of Electrical and Electronics Engineers]
日期:2015-04-01
卷期号:103 (4): 497-517
被引量:41
标识
DOI:10.1109/jproc.2015.2401553
摘要
Patterning functional materials is one of the key technologies to enable flexible electronics. In almost every flexible electronic device, individual materials and layers need to be patterned. Moreover, the importance of patterning is probably second only to materials properties in fabricated flexible functional devices. Frequently, patterning is one of the limiting factors in device performance. Flexible electronics depends upon the ability to construct layers of materials having precisely defined architectures and relationships on flexible supports. These structures require the ability to either deposit (additive) or remove (subtractive) materials in a locally controlled fashion (patterning). There are many techniques that have been used to accomplish the patterning of materials on flexible supports. In general, these patterning techniques have either been derived or adapted from conventional electronics processing, from printing processes, or from a hybrid of both. The appropriate choice of patterning technique will depend upon many considerations, including feature size, area of coverage, throughput, registration, environment, position in the overall device structure, and material considerations. Many, if not most device structures will require the use of multiple different patterning techniques. The purpose of this paper is to review the major patterning techniques that have been used for flexible electronics, and to discuss the unique features, advantages, and disadvantages of each. The focus will be on large area, high throughput, additive deposition techniques that can be performed in ambient conditions.
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