HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform

We present an interlayer slope waveguide, designed to guide light from one level to another level in a multilayer silicon photonics platform. The waveguide is fabricated using HWCVD a-Si:H at 350oC. Measured loss of 0.5 dB/slope was obtained at a wavelength of 1550 nm and for TE mode polarization.