材料科学
锡
氮化钛
薄膜
同种类的
磨料
复合材料
溅射沉积
成核
冶金
钛
溅射
氮化物
图层(电子)
纳米技术
物理
热力学
化学
有机化学
作者
Felipe C. da Silva,Marcelo de Matos Macedo,Juan Manuel Costa Miscione,Luís César Fontana,Julio César Sagás,Ronaldo Câmara Cozza,Cláudio Geraldo Schön
标识
DOI:10.1016/j.jmrt.2022.11.049
摘要
Homogeneous (HM) and functionally graded (FG) TiN thin films were produced by the grid-assisted magnetron sputtering (GAMS) technique. The joint use of ball-cratering micro-abrasive wear test (BCMA) and nanoscratching (NN) test was proposed and carried out to evaluate the wear resistance of TiN films. The results showed an increase of 33.3% wear resistance in the FG TiN thin film, when compared with the HM TiN thin film. This result was justified by the higher resistance to nucleation and propagation of cracks and higher level of adhesion to the substrate by the FG TiN thin film, validated through the NN tests.
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