光刻胶
制作
光刻
正交性
数码产品
纳米技术
材料科学
有机电子学
有机半导体
图层(电子)
光电子学
晶体管
电气工程
工程类
几何学
病理
替代医学
医学
数学
电压
作者
Alexander A. Zakhidov,Jin‐Kyun Lee,John A. DeFranco,Hon Hang Fong,Priscilla G. Taylor,Margarita Chatzichristidi,Christopher K. Ober,George G. Malliaras
出处
期刊:Chemical Science
[Royal Society of Chemistry]
日期:2011-01-01
卷期号:2 (6): 1178-1178
被引量:131
摘要
The concept of chemical orthogonality has long been practiced in the field of inorganic semiconductor fabrication, where it is necessary to deposit and remove a layer of photoresist without damaging the underlying layers. However, these processes involving light sensitive polymers often damage organic materials, preventing the use of photolithography to pattern organic electronic devices. In this article we show that new photoresist materials that are orthogonal to organics allow the fabrication of complex devices, such as hybrid organic/inorganic circuitry and full-colour organic displays. The examples demonstrate that properly designed photoresists enable the fabrication of organic electronic devices using existing infrastructure.
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