The eddy current sensor must be designed and evaluated so as to meet the requirement of special eddy current test.On the basis of analytical calculation,finite element method(FEM) is evaluated to be effective in design of sensor.The impedance calculation for single coil under different conditions is carried out,and differential coils are also tested and analyzed.Finally,3D model is successfully applied in calculation of the coil's impedance,which can also be applied in numerical analysis for design of special eddy current sensor.