Characterization and modeling of Al/sub 2/O/sub 3/ MIM capacitors: temperature and electrical field effects

This paper deals with the capacitance response of metal-insulator-metal (MIM) structures with 15 nm thick Al/sub 2/O/sub 3/ as dielectric. Electrical characterizations between 100 K and 450 K have been performed to study the temperature effect on the capacitance. An original model assuming that the permanent moment of the polar molecules in the Al/sub 2/O/sub 3/ film grows linearly with temperature is exposed to explain the experimental results.