Microstructure, mechanical properties, and wear behaviors of CrSiN films on oxynitriding-treated Vanadis 60 high-speed steel by the direct current magnetron sputtering process

This study utilized the direct current magnetron sputtering technique within the physical vapor deposition process to apply a chrome silicon nitride (CrSiN) coating onto the oxynitrided surface of Vanadis 60 high-speed steel. The experimental parameters include various deposition bias voltages (0, -25, -50, -75, and -100 V), a gas flow rate of 45/30 (Ar/N2) sccm, a power of 100 W, a voltage of 400 V, a deposition time of 2.5 h, and a deposition temperature of 225°C. The research results show that the substrate formed an oxynitriding layer with a thickness of about 30 μm, while the surface hardness increased to about 1300 HV0.05. When the coatings were deposited at a bias voltage of -100 V, the CrSiN coatings possessed the highest hardness (5.74 GPa) and elastic modulus (110.94 GPa), thus, it had the best wear resistance (specific wear rate was 1.19×10−5, and 7.29×10−5 mm3·m−1·N−1 under the loads of 1.5 N and 3 N), and good corrosion resistance (corrosion current was 3.28×10−5 A·cm−2, and polarization resistance was 793.18 Ω·cm2 in a 0.1 N H2SO4 solution). Furthermore, transmission electron microscopy observations confirm that the CrSiN coatings had a significant amorphous structure.