The machining accuracy is always impacted by the thermal deformation of the cutting tools in the diamond turning of the large metallic mirrors.To solve this problem,the rules of the thermal deformation to temperature of the diamond tool were studied.In consideration of the different thermal expansion coefficients and thermal diffusivities of the diamond crystal and the tool carrier,the theoretical calculation model of the thermal deformation was established according to certain temperature change,and some research achievements made by Russian scientists were referenced.The changes of the deformation and temperature of the tool were measured and recorded by the commercialized precise thermal imager and inductance micrometer.And the results indicate that the tool deformation reaches about 1.48 μm as the temperature rises from 23.4 ℃ to 32.1 ℃.