触针
材料科学
表面粗糙度
表面光洁度
放大倍数
陶瓷
基质(水族馆)
复合材料
光学显微镜
轮廓仪
光学
原子力显微镜
显微镜
扫描电子显微镜
纳米技术
声学
地质学
物理
海洋学
作者
Chin Y. Poon,Bharat Bhushan
出处
期刊:Wear
[Elsevier]
日期:1995-11-01
卷期号:190 (1): 76-88
被引量:404
标识
DOI:10.1016/0043-1648(95)06697-7
摘要
Surface roughness measurements were performed on a glass-ceramic disk substrate by stylus profiler (SP), atomic force microscope (AFM) and non-contact optical profiler (NOP). Results of surface measurements are presented and the differences between SP, AFM and NOP roughness measurements are discussed. The effects of stylus size, scan size and sampling interval on roughness parameters are investigated. The methodology of choosing the scan size and sampling interval is suggested. AFM is concluded to be the most suitable surface measuring instrument for roughness measurement on the glass-ceramic substrate. If SP is used to make the measurement, the tip radius should be in the order of 0.2 μ. However, localized damage to the test surface may occur owing to high contact stress. NOP using an objective magnification of 40 or lower is not recommended because the glass-ceramic substrate contains submicron roughness.
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