Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering

The research presents the principles of development and practical implementation (including rational modes) of combined treatment technology for the surface of precision parts with a broad beam of ions and/or fast argon atoms. In a single technological cycle, two process stages are realized: polishing with a beam at an incidence of 80º to the surface of parts made of different material, which enables a precision level of the surface roughness and deposition of protective nanostructured films on the parts immersed in dense plasma produced by magnetron sputtering in a mixture of inert and reactive gases. The developed innovative technology has a wide range of technological applications, but a particularly promising area is the processing of optical parts and elements.