期刊:Conference on Lasers and Electro-Optics日期:2022-01-01卷期号:: SF1D.2-SF1D.2被引量:1
标识
DOI:10.1364/cleo_si.2022.sf1d.2
摘要
We have developed silicon-photonic modulators with electro-optic polymer embedded silicon ladder-slot waveguide. 3-dB bandwidth calculated from RC product is estimated to be over 400 GHz. Fabricated modulators exhibited a half-voltage-length product (V π L) of 3.3 Vmm.