拉曼光谱
X射线光电子能谱
傅里叶变换红外光谱
类金刚石碳
材料科学
化学气相沉积
碳纤维
钻石
分析化学(期刊)
碳膜
石墨
基质(水族馆)
沉积(地质)
薄膜
化学工程
化学
纳米技术
光学
复合材料
有机化学
物理
生物
工程类
古生物学
地质学
沉积物
海洋学
复合数
作者
Stanislava Rabadzhiyska,Georgi Kotlarski,Stefan Valkov,Maria Ormanova,Мaria Shipochka,P. M. Rafailov,Petеr Petrov
标识
DOI:10.1016/j.matpr.2022.08.378
摘要
Diamond-like carbon (DLC) films were deposited at 300 °C, 400 °C and 500 °C on 304 L stainless steel substrates by electron-beam physical vapor deposition. The obtained coatings were characterized by Fourier Transform Infrared Spectroscopy (FTIR), Raman Spectroscopy and X-ray photo electron spectroscopy (XPS). The FTIR results demonstrate the presence of sp3 and sp2 vibrations corresponding to a diamond-like carbon phase and graphite, respectively. Raman and XPS analysis confirm a presence of high quantity of CC bonds in sp3 state in the deposited DLC films. Increasing the substrate temperature from 300 °C to 500 °C led to a decreasing of the hardness from 4.5 GPa to 3.2 GPa.
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