Novel workflow for metalens optical system design, simulation, and manufacture

In this article, we present a novel development workflow for the design, characterization, and manufacture of a metalens. The design is facilitated by creating a library holding the meta-atom responses as characterized by RCWA. A metalens can then be simulated from a technology file and its performance can be directly evaluated before proceeding to manufacturing. We demonstrate this workflow by comparing simulation results and experimental measurements for a metalens designed for an imaging device.