Silica sol was prepared using TEOS as the precursor and HNO3 as the catalyst by sol-gel process.The effects of the ratio of the reactants and reaction conditions on the particle size and particle size distribution of SiO2 sols were inspected during the sol-gel processing in this paper.The results showed that with the increasing of EtOH/TEOS molar ratio,the particle size of sols had a reducing trend.With the increasing of H2O/TEOS molar ratio,the sol particle size of sols had a growing trend.With the increasing of HNO3/TEOS molar ratio,the particle size of sols did not change obviously when pH value is less than 2.Reaction tempeture raising and reaction time increasing could urge particle size to enhance.