Size dependence of single-mode power for mode-stabilized oxide confined VCSELs

Summary form only given. The oxide-confined vertical-cavity surface-emitting laser (VCSEL) is an attractive light source due to low threshold current, and high conversion efficiency. In this paper we have investigated the dependence of the achievable fundamental mode power on the surface relief diameter for oxide-confined VCSELs emitting at 850 nm with oxide apertures of 9 and 12 /spl mu/m. The ring shaped surface relief increases the mirror loss in the etched areas thereby suppressing higher order transverse modes. The relief is fabricated using electron beam lithography and reactive ion beam etching. With an etch depth of 80 nm the mirror loss increases tenfold in the etched areas.