Bonding characteristics of DC magnetron sputtered B–C–N thin films investigated by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy
作者
V. Linss,Sandra E. Rodil,Petra Reinke,M. G. Garnier,P. Oelhafen,U. Kreißig,Frank Richter
出处
期刊:Thin Solid Films [Elsevier BV] 日期:2004-04-23卷期号:467 (1-2): 76-87被引量:100