Summary form only given. Miniature diode-pumped waveguide laser is promising as a compact and high-efficient coherent light source to convert the poor spatial and spectral mode output of the diode laser into a spatially and spectrally pure low noise beam, that is 'coherence converter'. Since waveguide structure leads to highly efficient laser oscillation by the high optical power densities with a short laser length, diode-pumped waveguide laser will be compact and simple coherent light source. Crystalline Nd:GGG films grown upon YAG crystal were successfully fabricated by pulsed laser deposition method with ceramic target. We showed that these films served as waveguide laser with high numerical aperture when pumped by diode laser. These films would become devices promising as compact and highly efficient coherence converters.