Study on humidity sensing characteristics of QCM based on LiCl humidity sensitive coating

Humidity sensing characteristics of quartz crystal microbalance(QCM)humidity sensor coated with LiCl,whose mass ratio is 0.2 %,is studied.The experimental results show that the QCM humidity sensing unit with mass ratio 0.2 % LiCl humidity sensitive coating exhibits broad linear range of 13 % ~94 %RH,high sensitivity,good repeatability,small hysteresis,digital output and nanogram-level measurement precision,and has very attractive prospect of application.