Large Nonlinearity and Low Loss Ge-Sb-Se Glass Photonic Devices in Near-Infrared

Ge ₂₈ Sb ₁₂ Se ₆₀ waveguides and microresonators were fabricated by thermal evaporation and dry etching technology. The low loss waveguides and high-index-contrast Ge ₂₈ Sb ₁₂ Se ₆₀ microring resonators were developed and demonstrated using the optimal parameters of CF ₄ /CHF ₃ etching recipe. An intrinsic quality factor (Q-factor) of 2.3 × 10 ⁵ with propagation loss of 2.4 dB/cm at 1550 nm was obtained in this microring resonator with 800 × 400 nm cross-sectional dimension. Critically coupled resonator showed extinction ratio of >30 dB. Nonlinear refractive index (n ₂ ) of 5.12 × 10 ^-18 m ² /W for Ge ₂₈ Sb ₁₂ Se ₆₀ glass was measured and nonlinear coefficient (γ) of 24 W ^-1 m ^-1 asfabricated waveguide was also estimated. This paper illustrates the potential of Ge ₂₈ Sb ₁₂ Se ₆₀ glass as a low loss and large nonlinearity material for integrated photonics applications.