A Novel MEMS Pressure Sensor with Residual Stress Compensation for Micro-Pressure Range

This paper introduces a micro-pressure range piezoresistive pressure sensor featuring temperature self-compensation. Unlike conventional pressure sensors, the proposed design incorporates an innovative “island-beam-membrane” composite structure, significantly enhancing sensitivity and linearity. The sensor employs the gravity of the island structure to compensate for residual stress, and when gravity compensation is insufficient, electrostatic force is utilized as an alternative stress compensation mechanism. Experimental evaluations demonstrate a measurement range of −500 Pa to 500 Pa, achieving a nonlinearity of 0.31% FS, a sensitivity of 8.78 mV/kPa, an accuracy of 0. 9 8% F S, a zero-temperature drift of 0.08% FS, and a full-range temperature drift of 0.09% FS. These results confirm that the novel structural design and compensation methods effectively enhance sensitivity, improve linearity, and reduce temperature-induced drift.