材料科学
半导体
光刻
光电子学
数码产品
纳米技术
带隙
激光器
制作
光电探测器
光学
电气工程
工程类
物理
病理
医学
替代医学
作者
Junhyuk Bang,Yeongju Jung,Hyungjun Kim,Dongkwan Kim,Maenghyo Cho,Seung Hwan Ko
出处
期刊:Nano-micro Letters
[Springer Science+Business Media]
日期:2022-01-25
卷期号:14 (1): 49-49
被引量:55
标识
DOI:10.1007/s40820-021-00786-1
摘要
Abstract Active electronics are usually composed of semiconductor and metal electrodes which are connected by multiple vacuum deposition steps and photolithography patterning. However, the presence of interface of dissimilar material between semiconductor and metal electrode makes various problems in electrical contacts and mechanical failure. The ideal electronics should not have defective interfaces of dissimilar materials. In this study, we developed a novel method to fabricate active electronic components in a monolithic seamless fashion where both metal and semiconductor can be prepared from the same monolith material without creating a semiconductor–metal interface by reversible selective laser-induced redox (rSLIR) method. Furthermore, rSLIR can control the oxidation state of transition metal (Cu) to yield semiconductors with two different bandgap states (Cu 2 O and CuO with bandgaps of 2.1 and 1.2 eV, respectively), which may allow multifunctional sensors with multiple bandgaps from the same materials. This novel method enables the seamless integration of single-phase Cu, Cu 2 O, and CuO, simultaneously while allowing reversible, selective conversion between oxidation states by simply shining laser light. Moreover, we fabricated a flexible monolithic metal–semiconductor–metal multispectral photodetector that can detect multiple wavelengths. The unique monolithic characteristics of rSLIR process can provide next-generation electronics fabrication method overcoming the limitation of conventional photolithography methods.
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