Scalable production of solid-immersion lenses for quantum emitters in silicon carbide

4H–silicon carbide (SiC) shows the capability of hosting a large number of promising emitters for quantum technology. However, due to its high refractive index, the collection of photoluminescence emission is compromised for further applications. Here, we demonstrate a scalable approach of manufacturing solid-immersion lenses (SILs) on 4H–SiC. The procedure results in SILs with high effective NA. The fluorescence collection efficiency of single quantum emitters under the SILs shows 3.4 times enhancement confirmed by confocal microscopy of individual V2.