Lv11
60 积分 2025-09-29 加入
Effect of Multilayer versus Monolayer Dodecanethiol on Selectivity and Pattern Integrity in Area Selective Atomic Layer Deposition
7天前
已完结
Area‐Selective Atomic Layer Deposition Using Vapor Dosing of Short‐Chain Alkanethiol Inhibitors on Metal/Dielectric Surfaces
7天前
已完结
Molecular Design in Area-Selective Atomic Layer Deposition: Understanding Inhibitors and Precursors
8天前
已完结
Self-Correcting Process for High Quality Patterning by Atomic Layer Deposition
8天前
已完结
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
8天前
已完结
Cobalt Precursor as Surface Inhibitor for Area-Selective Atomic Layer Deposition of Nanoscale Electronic Interconnects
13天前
已完结
Area-selective deposition of dielectric film by surface passivation for bottom-up nanopatterning fabrication
13天前
已关闭
Stress in Thermally Annealed Parylene Films
19天前
已完结
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self-Aligned Via Integration
28天前
已完结
0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
29天前
已完结
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