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46 积分 2024-04-03 加入
Parametric curvilinear OPC using B-splines data format
3天前
已完结
Accelerating polymer self-consistent field simulation and inverse DSA-lithography with deep neural networks
25天前
已完结
Large-scale VLSI mask optimization: a survey
29天前
已关闭
Development and application of actinic evaluation platform on comprehensive optical properties of EUV pellicle at Pohang Accelerator Laboratory
1个月前
已完结
Machine learning enhanced optical proximity correction modeling for high-NA EUV lithography
1个月前
已关闭
EUV full-chip curvilinear mask options for logic via and metal patterning
1个月前
已完结
Computing method for extreme ultraviolet lithography imaging with aberration consideration
3个月前
已完结
Impact of partial coherence on the apparent optical transfer function derived from the response to amplitude edges
3个月前
已关闭
Selective Dissolution Resistance Control of EUV Photoresist Using Multiscale Simulation: Rational Design of Hybrid System
3个月前
已完结
Multiscale approach for modeling EUV patterning of chemically amplified resist
3个月前
已完结
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