| 标题 |
A strategy to enhance the electron temperature in modulated pulsed power magnetron sputtering (MPPMS) discharges for the deposition of diamond-like carbon thin films |
| 网址 | |
| DOI | |
| 其它 |
期刊:Plasma Sources Science and Technology 作者:Y G Li; Y F Shi; L Cui 出版日期:2026-02-11 |
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(2025-6-4)