| 标题 |
Novel CVD diamond-coated conditioner for improved performance in CMP processes |
| 网址 | |
| DOI | |
| 其它 |
期刊:International Journal of Machine Tools and Manufacture 作者:Youn-Chul Kim; Suk-Joong L. Kang 出版日期:2011-02-24 |
| 求助人 | |
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(2025-6-4)