| 标题 |
AI-Powered Defect Detection using Deep Learning: A Pattern-Agnostic Faster R-CNN Approach for SEM Images with GPU Acceleration |
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| DOI | |
| 其它 |
期刊:2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 作者:Hosam Hatem; Amr Essam; Hesham Samir; Ahmed ElDessouki; Stewart Wu; et al 出版日期:2025-05-28 |
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(2025-6-4)