| 标题 |
Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator |
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| DOI | |
| 其它 |
期刊:Journal of Alloys and Compounds 作者:Seong‐In Cho; Jong Beom Ko; Seung Hee Lee; Junsung Kim; Sang‐Hee Ko Park 出版日期:2021-10-14 |
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(2025-6-4)