| 标题 |
Nucleation behavior of CVD Cu on Ru substrate having different crystal orientation
不同晶向Ru衬底上CVD Cu的成核行为
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| 网址 | |
| DOI |
暂未提供,该求助的时间将会延长,查看原因?
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| 其它 |
Advanced Metallization Conference (AMC) ISSN: 15401766 Pages: 525 - 530 Conference Paper2006 EID: 2-s2.0-33644949896 |
| 求助人 | |
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