Compliant substrate epitaxial MgZnO films using fluorphlogopite mica approaching homoepitaxy quality

Based on the success of high-quality epitaxial grown ZnO film on the compliant Fluorphlogopite Mica (F-Mica) substrate, the growth of MgZnO films on F-Mica substrate is studied to promote the development of flexible ZnO quantum well structures and devices. These flexible epitaxial MgZnO films show high luminous quality approaching homoepitaxial films. The phenomenon of Mg compositional fluctuations is confirmed by the research on band tail state. The effect of the compositional fluctuations on epitaxial growth dynamical and thermodynamic processes is also revealed by the comprehensively investigation of the crystal quality, optical properties, morphology, and growth rate. The study provides guidance for energy band engineering of ZnO on flexible substrates, and lays the foundation for the bendable optoelectronic devices on F-Mica substrate.