This paper describes a research of quartz crystal microbalances(QCM) coated with nanocrystalline ZnO used as relative humidity sensors.Sensing experiments were examined by measuring the resonance frequency shift of QCM which due to the additional mass loading when the QCM in the different relative humidity atmosphere.The results showed that the higher relative humidity,the longer the response time,and in the same high relative humidity,the more ZnO is coated,the longer response time is.