The micro-generator based on MEMS technology becomes a research focus for its volume and long lifetime.At present,micro-generator can be classified into vibration generator and rotational generator.Vibration generator has simple structure,but low energy density.And rotational generator can operate at very high-speed,so has a high energy density.Operating principle and characteristics of rotational generator were described.Introduced the research situation,including typical research achievements and the summation of the structure,material and process technology of rotational generator.Pointed out development trend of micro generators,sought the marital and process technology which can help simplifying assembling and batch fabrication.Because of the emergence of micro-rotational generator,the dream small machine,high power can come true.