(Bi2O3)0.75(Er2O3)0.20(Ag2O)0.05 was used as solid electrolyte and Pt, Pd, Au, Ag made by sputtering in vacancY and thermal decomposing in air were used as electrodes. The influences of thickness, materials and preparation method of electrodes on ac impedance were studied in detail and the mechanism was also discussed. A equivalent circuit was proposed.