X射线光电子能谱
化学气相沉积
钼
碳化物
拉曼光谱
材料科学
分析化学(期刊)
微波食品加热
辉光放电
氢
等离子体
化学
化学工程
纳米技术
冶金
光学
物理
工程类
有机化学
量子力学
色谱法
作者
Hongyang Zhao,Kang Cai,Zhibin Ma,Zhenxiang Cheng,Tingting Jia,Hideo Kimura,Qiuming Fu,Hong Tao,Liwei Xiong
摘要
A method to synthesize molybdenum carbides has been developed based on microwave plasma treatment with methane and hydrogen mixed gases, using a microwave-plasma chemical vapor deposition device. The device framework and its mechanism are described in detail. Two-dimensional α-Mo2C has been directly synthesized by a plate-to-plate substrate holder structure with a microwave power of 920 W and a partial pressure of 20 kPa. In-situ optical emission spectroscopy was used to measure the radical types in the plasma ball during glow discharge. The as-grown α-Mo2C samples were characterized by X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy to determine their phases, purity and chemical groups. The superconducting transition temperature was measured, and the transition temperatures of the relevant phases are discussed in detail. The results confirmed that this method is an efficient way to obtain molybdenum carbides and inspire new research interest in transition metal carbides, which have many intrinsic local properties and applications.
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