The effect of defocusing on spot diameter when ablate the silicon surface by femtosecond laser

Femtosecond laser has been demonstrated to be a prominent tool to manufacture micro scale structure. In the processing, the focusing lens is usually used as the concentrated tool to assemble the original beam to the tiny spot to provide enough energy for ablation. What is more, different focal length means the diverse scale of the focused spot. In common use, various sizes of the spot are required to adjust to the multifarious profiles and substituting the focus lens is the general method. There is no doubt that changing the lens is a fussy job and frequent replacing the lens may cause the lack of stability. In this paper, we report the defocus of the lens to modify the scale of the spot and it is proved to be an effective way to vary the diameter of the focused spot without changing the focus lens.